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Maintaining Acceptable Level of MEMS Strip Warpage through Package Thickness Control

Journal: International Research Journal of Advanced Engineering and Science (Vol.4, No. 4)

Publication Date:

Authors : ;

Page : 58-59

Keywords : MEMS strip warpage; package thickness control; model validation; finite element modeling;

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Abstract

MEMS (micro-electro-mechanical system) semiconductor package is assembled in a single panel large substrate strip format as shown in Fig. 1.  Package molding or encapsulation is done using compression molding process.

Last modified: 2020-06-14 20:42:45